Fabrication and characterization of sub-100/10?nm planar nanofluidic channels by triple thermal oxidation and silicon-glass anodic bonding

We reported the fabrication and characterization of nanofluidic channels by Triple Thermal Oxidation and Silicon-Glass Anodic Bonding. Planar nanochannels with depths from sub-100 nm down to sub-10 nm were realized by this method. A theoretical model was developed to precisely predict the depth of nanochannels. The depth and uniformity of nanochannels showed good stability during anodic bonding. This method is promising for various nanofluidic studies, such as nanofluidic electrokinetics, biomolecule manipulation, and energy conversion.     

Fabrication of two dimensional polyethylene terephthalate nanofluidic chip using hot embossing and thermal bonding technique

We present in this paper a method for obtaining a low cost and high replication precision 2D (two dimensional) nanofluidic chip with a PET (polyethylene terephthalate) sheet, which uses hot embossing and a thermal bonding technique. The hot embossing process parameters were optimized by both experiments and the finite element method to improve the replication precision of the 2D nanochannels. With the optimized process parameters, 174.67 ± 4.51 nm wide and 179.00 ± 4.00 nm deep nanochannels were successfully replicated into the PET sheet with high replication precision of 98.4%. O₂ plasma treatment was carried out before the bonding process to decrease the dimension loss and improve the bonding strength of the 2D nanofluidic chip. The bonding parameters were optimized by bonding rate of the nanofluidic chip. The experiment results show that the bonding strength of the 2D PET nanofluidic chip is 0.664 MPa, and the total dimension loss of 2D nanochannels is 4.34 ± 7.03 nm and 18.33 ± 9.52 nm, in width and depth, respectively. The fluorescence images demonstrate that there is no blocking or leakage over the entire micro- and nanochannels. With this fabrication technology, low cost polymer nanochannels can be fabricated, which allows for commercial manufacturing of nano-components.     

Review article: Fabrication of nanofluidic devices

Thanks to its unique features at the nanoscale, nanofluidics, the study and application of fluid flow in nanochannels/nanopores with at least one characteristic size smaller than 100 nm, has enabled the occurrence of many interesting transport phenomena and has shown great potential in both bio- and energy-related fields. The unprecedented growth of this research field is apparently attributed to the rapid development of micro/nanofabrication techniques. In this review, we summarize recent activities and achievements of nanofabrication for nanofluidic devices, especially those reported in the past four years. Three major nanofabrication strategies, including nanolithography, microelectromechanical system based techniques, and methods using various nanomaterials, are introduced with specific fabrication approaches. Other unconventional fabrication attempts which utilize special polymer properties, various microfabrication failure mechanisms, and macro/microscale machining techniques are also presented. Based on these fabrication techniques, an inclusive guideline for materials and processes selection in the preparation of nanofluidic devices is provided. Finally, technical challenges along with possible opportunities in the present nanofabrication for nanofluidic study are discussed.     

Cloning SU8 silicon masters using epoxy resins to increase feature replicability and production for cell culture devices

In recent years, there has been a dramatic increase in the use of poly(dimethylsiloxane) (PDMS) devices for cell-based studies. Commonly, the negative tone photoresist, SU8, is used to pattern features onto silicon wafers to create masters (SU8-Si) for PDMS replica molding. However, the complexity in the fabrication process, low feature reproducibility (master-to-master variability), silane toxicity, and short life span of these masters have been deterrents for using SU8-Si masters for the production of cell culture based PDMS microfluidic devices. While other techniques have demonstrated the ability to generate multiple devices from a single master, they often do not match the high feature resolution (∼0.1 μm) and low surface roughness that soft lithography masters offer. In this work, we developed a method to fabricate epoxy-based masters that allows for the replication of features with high fidelity directly from SU8-Si masters via their PDMS replicas. By this method, we show that we could obtain many epoxy based masters with equivalent features to a single SU8-Si master with a low feature variance of 1.54%. Favorable feature transfer resolutions were also obtained by using an appropriate Tg epoxy based system to ensure minimal shrinkage of features ranging in size from ∼100 μm to <10 μm in height. We further show that surface coating epoxy masters with Cr/Au lead to effective demolding and yield PDMS chambers that are suitable for long-term culturing of sensitive primary hippocampal neurons. Finally, we incorporated pillars within the Au-epoxy masters to eliminate the process of punching media reservoirs and thereby reducing substantial artefacts and wastage.     

Ionic thermal up-diffusion in nanofluidic salinity-gradient energy harvesting

Advances in nanofabrication and materials science give a boost to the research in nanofluidic energy harvesting. Contrary to previous efforts on isothermal conditions, here a study on asymmetric temperature dependence in nanofluidic power generation is conducted. Results are somewhat counterintuitive. A negative temperature difference can significantly improve the membrane potential due to the impact of ionic thermal up-diffusion that promotes the selectivity and suppresses the ion-concentration polarization, especially at the low-concentration side, which results in dramatically enhanced electric power. A positive temperature difference lowers the membrane potential due to the impact of ionic thermal down-diffusion, although it promotes the diffusion current induced by decreased electrical resistance. Originating from the compromise of the temperature-impacted membrane potential and diffusion current, a positive temperature difference enhances the power at low transmembrane-concentration intensities and hinders the power for high transmembrane-concentration intensities. Based on the system''s temperature response, we have proposed a simple and efficient way to fabricate tunable ionic voltage sources and enhance salinity-gradient energy conversion based on small nanoscale biochannels and mimetic nanochannels. These findings reveal the importance of a long-overlooked element—temperature—in nanofluidic energy harvesting and provide insights for the optimization and fabrication of high-performance nanofluidic power devices.     

DNA translocation through short nanofluidic channels under asymmetric pulsed electric field

Investigation of single molecule DNA dynamics in confined environments has led to important applications in DNA analysis, separation, and sequencing. Here, we studied the electrophoretic transport of DNA molecules through nanochannels shorter than the DNA contour length and calculated the associated translocation time curves. We found that the longer T4 DNA molecules required a longer time to traverse a fixed length nanochannel than shorter λ DNA molecules and that the translocation time decreased with increasing electric field which agreed with theoretical predictions. We applied this knowledge to design an asymmetric electric pulse and demonstrate the different responses of λ and T4 DNA to the pulses. We used Brownian dynamics simulations to corroborate our experimental results on DNA translocation behaviour. This work contributes to the fundamental understanding of polymer transport through nanochannels and may help in designing better separation techniques in the future.     

Fabrication of nanochannels on polystyrene surface

Solvent-induced nanocrack formation on polystyrene surface is investigated experimentally. Solubility parameter and diffusion coefficient of alcohols are employed to elucidate the swelling and cracking processes as well as the crack size. Experimental results show that the crack size increases with the heating temperature, heating time, and the concentration and volume of the alcohols. A guideline on fabricating single smaller nanocracks on polymers by solvent-induced method is provided. Nanocracks of approximately 64 nm in width and 17.4 nm in depth were created and replicated onto PDMS (polydimethylsiloxane) slabs to form nanochannels.     

Fabrication of long poly(dimethyl siloxane) nanochannels by replicating protein deposit from confined solution evaporation

A relatively simple, inexpensive and reliable technique was developed to fabricate an array of nanochannels. Moreover, the nanochannels are directly integrated to microchannels as a whole, which facilitates solution loading from the millimeter-scaled loading reservoirs into the nanochannels. It is found that continuous bovine serum albumin (BSA) line structures with triangle-like cross section at nanoscale can be obtained by evaporation of BSA solution with concentration between 0.5 wt. % and 1 wt. % inside the microchannels. The poly(dimethyl siloxane) nanochannels were replicated from these line structures, followed by sealing with the glass slide. The DNA molecules can be stretched inside the nanochannels as fabricated.     

Single nanopore transport of synthetic and biological polyelectrolytes in three-dimensional hybrid microfluidic∕nanofluidic devices

This paper presents a study of electrokinetic transport in single nanopores integrated into vertically stacked three-dimensional hybrid microfluidic∕nanofluidic structures. In these devices, single nanopores, created by focused ion beam (FIB) milling in thin polymer films, provide fluidic connection between two vertically separated, perpendicular microfluidic channels. Experiments address both systems in which the nanoporous membrane is composed of the same (homojunction) or different (heterojunction) polymer as the microfluidic channels. These devices are then used to study the electrokinetic transport properties of synthetic (i.e., polystyrene sulfonate and polyallylamine) and biological (i.e., DNA) polyelectrolytes across these nanopores using both electrical current measurements and confocal microscopy. Both optical and electrical measurements indicate that electro-osmotic transport is predominant over electrophoresis in single nanopores with d>180 nm, consistent with results obtained under similar conditions for nanocapillary array membranes.     

Stretching of DNA confined in nanochannels with charged walls

There is currently a growing interest in control of stretching of DNA inside nanoconfined regions due to the possibility to analyze and manipulate single biomolecules for applications such as DNA mapping and barcoding, which are based on stretching the DNA in a linear fashion. In the present work, we couple Finite Element Methods and Monte Carlo simulations in order to study the conformation of DNA molecules confined in nanofluidic channels with neutral and charged walls. We find that the electrostatic forces become more and more important when lowering the ionic strength of the solution. The influence of the nanochannel cross section geometry is also studied by evaluating the DNA elongation in square, rectangular, and triangular channels. We demonstrate that coupling electrostatically interacting walls with a triangular geometry is an efficient way to stretch DNA molecules at the scale of hundreds of nanometers. The paper reports experimental observations of λ-DNA molecules in poly(dimethylsiloxane) nanochannels filled with solutions of different ionic strength. The results are in good agreement with the theoretical predictions, confirming the crucial role of the electrostatic repulsion of the constraining walls on the molecule stretching.     

Making a hydrophoretic focuser tunable using a diaphragm

Microfluidic diagnostic devices often require handling particles or cells with different sizes. In this investigation, a tunable hydrophoretic device was developed which consists of a polydimethylsiloxane (PDMS) slab with hydrophoretic channel, a PDMS diaphragm with pressure channel, and a glass slide. The height of the hydrophoretic channel can be tuned simply and reliably by deforming the elastomeric diaphragm with pressure applied on the pressure channel. This operation allows the device to have a large operating range where different particles and complex biological samples can be processed. The focusing performance of this device was tested using blood cells that varied in shape and size. The hydrophoretic channel had a large cross section which enabled a throughput capability for cell focusing of ∼15 000 cells s⁻¹, which was more than the conventional hydrophoretic focusing and dielectrophoresis (DEP)-active hydrophoretic methods. This tunable hydrophoretic focuser can potentially be integrated into advanced lab-on-a-chip bioanalysis devices.     

Deformation properties between fluid and periodic circular obstacles in polydimethylsiloxane microchannels: Experimental and numerical investigations under various conditions

Understanding the mechanical properties of optically transparent polydimethylsiloxane (PDMS) microchannels was essential to the design of polymer-based microdevices. In this experiment, PDMS microchannels were filled with a 100 μM solution of rhodamine 6G dye at very low Reynolds numbers (∼10⁻³). The deformation of PDMS microchannels created by pressure-driven flow was investigated by fluorescence microscopy and quantified the deformation by the linear relationship between dye layer thickness and intensity. A line scan across the channel determined the microchannel deformation at several channel positions. Scaling analysis widely used to justify PDMS bulging approximation was allowed when the applied flow rate was as high as 2.0 μl/min. The three physical parameters (i.e., flow rate, PDMS wall thickness, and mixing ratio) and the design parameter (i.e., channel aspect ratio = channel height/channel width) were considered as critical parameters and provided the different features of pressure distributions within polymer-based microchannel devices. The investigations of the four parameters performed on flexible materials were carried out by comparison of experiment and finite element method (FEM) results. The measured Young''s modulus from PDMS tensile test specimens at various circumstances provided reliable results for the finite element method. A thin channel wall, less cross-linker, high flow rate, and low aspect ratio microchannel were inclined to have a significant PDMS bulging. Among them, various mixing ratios related to material property and aspect ratios were one of the significant factors to determine PDMS bulging properties. The measured deformations were larger than the numerical simulation but were within corresponding values predicted by the finite element method in most cases.     

Surface modification on polydimethylsiloxane-based microchannels with fragmented poly(l-lactic acid) nanosheets

Surface modification is a critical issue in various applications of polydimethylsiloxane (PDMS)-based microfluidic devices. Here, we describe a novel method through which PDMS-based microchannels were successfully modified with fragmented poly(l-lactic acid) (PLLA) nanosheets through a simple patchwork technique that exploited the high level of adhesiveness of PLLA nanosheets. Compared with other surface modification methods, our method required neither complicated chemical modifications nor the use of organic solvents that tend to cause PDMS swelling. The experimental results indicated that the modified PDMS exhibited excellent capacity for preventing the adhesion and activation of platelets. This simple yet efficient method can be used to fabricate the special PDMS microfluidic devices for biological, medical, and even hematological purposes.     

Simplified prototyping of perfusable polystyrene microfluidics

Cell culture in microfluidic systems has primarily been conducted in devices comprised of polydimethylsiloxane (PDMS) or other elastomers. As polystyrene (PS) is the most characterized and commonly used substrate material for cell culture, microfluidic cell culture would ideally be conducted in PS-based microsystems that also enable tight control of perfusion and hydrodynamic conditions, which are especially important for culture of vascular cell types. Here, we report a simple method to prototype perfusable PS microfluidics for endothelial cell culture under flow that can be fabricated using standard lithography and wet laboratory equipment to enable stable perfusion at shear stresses up to 300 dyn/cm² and pumping pressures up to 26 kPa for at least 100 h. This technique can also be extended to fabricate perfusable hybrid PS-PDMS microfluidics of which one application is for increased efficiency of viral transduction in non-adherent suspension cells by leveraging the high surface area to volume ratio of microfluidics and adhesion molecules that are optimized for PS substrates. These biologically compatible microfluidic devices can be made more accessible to biological-based laboratories through the outsourcing of lithography to various available microfluidic foundries.     

Stable chemical bonding of porous membranes and poly(dimethylsiloxane) devices for long-term cell culture

We have investigated the bonding stability of various silane treatments for the integration of track-etched membranes with poly(dimethylsiloxane) (PDMS) microfluidic devices. We compare various treatments using trialkoxysilanes or dipodal silanes to determine the effect of the organofunctional group, cross-link density, reaction solvent, and catalyst on the bond stability. We find that devices made using existing silane methods delaminated after one day when immersed in cell culture medium at 37 °C. In contrast, the dipodal silane, bis[3-(trimethoxysilyl)propyl]amine, is shown to yield stable and functional integration of membranes with PDMS that is suitable for long-term cell culture. To demonstrate application of the technique, we fabricated an open-surface device in which cells cultured on a track-etched membrane can be stimulated at their basal side via embedded microfluidic channels. C2C12 mouse myoblasts were differentiated into myotubes over the course of two weeks on these devices to demonstrate biocompatibility. Finally, devices were imaged during the basal-side delivery of a fluorescent stain to validate the membrane operation and long-term stability of the bonding technique.     

Fabrication of nanofluidic diodes with polymer nanopores modified by atomic layer deposition

Surface charge distribution is a crucial factor for the ionic transport properties inside nanopores. Modifying the surface charge inside a single conical nanopore can greatly affect the rectification behavior of the ionic current through the nanopore and afford nanofluidic diodes. In this work, we describe a new method to fabricate nanofluidic diodes by atomic layer deposition (ALD) on conical track-etched nanopores. Thorough investigation of the ionic transport behavior through ALD-modified polyethylene terephthalate (PET) nanopores is carried out. Our results demonstrate that ALD is a simple and effective method to modify the inner surface of the polymer nanopores for fabricating nanofluidic devices. In addition, we also investigate the stability of the ALD-modified nanopores, and the results suggest that the long-time stability could be compromised by high voltage applied along the nanopore.     

Protein sensing by nanofluidic crystal and its signal enhancement

Nanofluidics has a unique property that ionic conductance across a nanometer-sized confined space is strongly affected by the space surface charge density, which can be utilized to construct electrical read-out biosensor. Based on this principle, this work demonstrated a novel protein sensor along with a sandwich signal enhancement approach. Nanoparticles with designed aptamer onside are assembled in a suspended micropore to form a 3-dimensional network of nanometer-sized interstices, named as nanofluidic crystal hereafter, as the basic sensing unit. Proteins captured by aptamers will change the surface charge density of nanoparticles and thereby can be detected by monitoring the ionic conductance across this nanofluidic crystal. Another aptamer can further enlarge the variations of the surface charge density by forming a sandwich structure (capturing aptamer/protein/signal enhancement aptamer) and the read-out conductance as well. The preliminary experimental results indicated that human α-thrombin was successfully detected by the corresponding aptamer modified nanofluidic crystal with the limit of detection of 5 nM (0.18 μg/ml) and the read-out signal was enhanced up to 3 folds by using another thrombin aptamer. Being easy to graft probe, facile and low-cost to prepare the nano-device, and having an electrical read-out, the present nanofluidic crystal scheme is a promising and universal strategy for protein sensing.     

Sealing SU-8 microfluidic channels using PDMS

A simple method of irreversibly sealing SU-8 microfluidic channels using PDMS is reported in this paper. The method is based on inducing a chemical reaction between PDMS and SU-8 by first generating amino groups on PDMS surface using N₂ plasma treatment, then allowing the amino groups to react with the residual epoxy groups on SU-8 surface at an elevated temperature. The N₂ plasma treatment of PDMS can be conducted using an ordinary plasma chamber and high purity N₂, while the residual epoxy groups on SU-8 surface can be preserved by post-exposure baking SU-8 at a temperature no higher than 95 °C. The resultant chemical bonding between PDMS and SU-8 using the method create an interface that can withstand a stress that is greater than the bulk strength of PDMS. The bond is permanent and is long-term resistant to water. The method was applied in fabricating SU-8 microfluidi-photonic integrated devices, and the obtained devices were tested to show desirable performance.     

A rapid,inexpensive surface treatment for enhanced functionality of polydimethylsiloxane microfluidic channels

A rapid, inexpensive method using alkoxysilanes has been developed to selectively coat the interior of polydimethylsiloxane (PDMS) microfluidic channels with an integral silicaceous layer. This method combines the rapid prototyping capabilities of PDMS with the desirable wetting and electroosmotic properties of glass. The procedure can be carried out on the open faces of PDMS blocks prior to enclosure of the channels, or by flowing the reagents through the preformed channels. Therefore, this methodology allows for high-throughput processing of entire microfluidic devices or selective modification of specific areas of a device. Modification of PDMS with tetraethoxysilane generated a stable surface layer, with enhanced wettability and a more stable electroosmotic flow rate than native PDMS. Modification of PDMS with 3-aminopropyltriethoxysilane generated a surface layer bearing amine functionalities allowing for further chemical derivatization of the PDMS surface.     

Entropic depletion of DNA in triangular nanochannels

Using Monte Carlo simulations of a touching-bead model of double-stranded DNA, we show that DNA extension is enhanced in isosceles triangular nanochannels (relative to a circular nanochannel of the same effective size) due to entropic depletion in the channel corners. The extent of the enhanced extension depends non-monotonically on both the accessible area of the nanochannel and the apex angle of the triangle. We also develop a metric to quantify the extent of entropic depletion, thereby collapsing the extension data for circular, square, and various triangular nanochannels onto a single master curve for channel sizes in the transition between the Odijk and de Gennes regimes.