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Sol-gel法制备BZT铁电薄膜及其电性能的研究
引用本文:印志强.Sol-gel法制备BZT铁电薄膜及其电性能的研究[J].绥化学院学报,2009,29(4):176-178.
作者姓名:印志强
作者单位:绥化学院物理与电子信息系,黑龙江绥化,152061
摘    要:Sol-gel法制备BZT铁电薄膜,用X射线衍射仪(BSX3200)和扫描电子显微镜研究了BZT的结构和表面形貌,用差热-热失重(TG-DTA)析谱分析BZT粉体的退火工艺.测定了薄膜的电性能:薄膜不加偏压下的介电常数大约为620左右,介电损耗和调谐量分别为0.0335和48.63%.

关 键 词:Sol-gel法  介电性能  损耗因子

Study on sol-gel Preparation BZT Ferroelectric Thin Films and their Electrical Properties
Yin Zhiqiang.Study on sol-gel Preparation BZT Ferroelectric Thin Films and their Electrical Properties[J].Journal of Suihua University,2009,29(4):176-178.
Authors:Yin Zhiqiang
Abstract:Sol-gel Preparation BZT ferroelectric thin films. The structure and surface morphology of BZT thin films were in-vestigated by X-ray diffraction and scanning electron microscopy,the annealing process of films were investigated by TG-DTA.The electrical properties of the film was mensured:The film dielectric constant of about 620 without bias,the dielectric loss and tenabiLi-ty of the film were 0.0335 and 48.63%.
Keywords:sol-gel  dielectric properties  loss factor
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