| 催化剂种类对PECVD制备碳纳米管的影响 |
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| 引用本文： | 席彩萍.催化剂种类对PECVD制备碳纳米管的影响[J].渭南师范学院学报,2011(12):46-49. |
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| 作者姓名： | 席彩萍 |
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| 作者单位： | 渭南师范学院物理与电气工程学院,陕西渭南,714000 |
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| 基金项目： | 渭南师范学院重点科研计划项目(10YKF012) |
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| 摘 要： | 采用PEVCD技术，分别用Fe、Ni、Co作为催化剂，在Si基底上沉积出了不同形貌的碳纳米管．并用扫描电镜对碳纳米管的形貌进行了表征．而且深入研究了不同催化剂种类对碳纳米管生长的影响机理．结果表明：Ni是这3种催化剂中最适合沉积碳纳米管的催化剂．
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| 关 键 词： | 碳纳米管 催化剂 PECVD |
The Effect of Catalyst on Carbon Nanotubes Synthesized by Plasma Enhanced Chemical Vapor Deposition |
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| XI Cai-ping.The Effect of Catalyst on Carbon Nanotubes Synthesized by Plasma Enhanced Chemical Vapor Deposition[J].Journal of Weinan Teachers College,2011(12):46-49. |
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| Authors: | XI Cai-ping |
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| Institution: | XI Cai-ping (Department of Physics and Electrical Engineering,Weinan Teachers University,Weinan 714000,China) |
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| Abstract: | The different morphology carbon nanotubes grown on Si substrates with Fe,Ni and Co as catalysts are obtained by a technology of plasma enhanced chemical vapor deposition(PECVD).The surface morphology of carbon nanotubes are characterized by scanning electron microscopy.The effect of catalyst on carbon nanotubes has been in depth investigated with the results that Ni is the optimum catalyst of depositing carbon nanotubes in the three catalysts. |
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| Keywords: | carbon nanotubes catalyst PECVD |
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