| 基于参比电容和锁定放大的微电容测量仪 |
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| 引用本文： | 彭建学,叶银忠.基于参比电容和锁定放大的微电容测量仪[J].上海海事大学学报,2009,30(2):25-28. |
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| 作者姓名： | 彭建学 叶银忠 |
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| 作者单位： | 1. 上海海事大学物流工程学院,上海200135;上海奥波电子有限公司,上海200072
2. 上海海事大学物流工程学院,上海,200135 |
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| 摘 要： | 针对传统微电容测量技术存在的缺点,根据参比电容和锁定放大技术的微电容测量原理,研制出1种微电容测量仪.该微电容测量仪采用参比测量技术,用锁定放大技术对测量系统的噪声进行抑制.试验表明采用参比测量技术使测量结果不受激励电压波形和幅度影响.该微电容测量仪的最小测量量程达到0.1 pF,其微电容测量电路已申请发明专利.
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| 关 键 词： | 微电容测量 锁定放大 参比电容 噪声抑制 |
| 收稿时间： | 2008/11/26 0:00:00 |
| 修稿时间： | 2009/3/26 0:00:00 |
Low capacitance measuring instrument based on reference capacitance and lock in amplifier |
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| PENG Jianxue,YE Yinzhong.Low capacitance measuring instrument based on reference capacitance and lock in amplifier[J].Journal of Shanghai Maritime University,2009,30(2):25-28. |
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| Authors: | PENG Jianxue YE Yinzhong |
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| Institution: | Shanghai aoboor electronic co.ltd. and Logistics Engineering College, Shanghai Maritime Univ. |
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| Abstract: | In view of the disadvantages of the conventional technology of measuring the low capacitance, a kind of low capacitance measurer is proposed according to the principle of the reference capacitance and lock in amplifier technologies of measuring the low capacitance. Applying the technology of the reference measuring, the noise of the measuring system is suppressed by the lock in amplifier technology in this measurer. The tests show that the test results are free from the wave shape and amplitude of driving voltage, and the minimal measuring range is 0.1 pF. The low capacitance measuring circuit of this measurer has been applied for a national patent of invention. |
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| Keywords: | low capacitance measuring lock in amplification reference capacitance noise suppressing |
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