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利用流化床气相反应在Al2O3超细粒子表面淀积SnO2薄膜的形态分析
引用本文:华彬,施利毅,李春忠.利用流化床气相反应在Al2O3超细粒子表面淀积SnO2薄膜的形态分析[J].上海大学学报(英文版),1999,3(1):62-65.
作者姓名:华彬  施利毅  李春忠
作者单位:School of Chemistry and Chemical Engineering, Shanghai University,Institute of Technical Chemistry and Physics, East China University of Science and Technology
摘    要:

关 键 词:thin  film  coating  ultrafine  particles
收稿时间:13 July 1998

Morphology and structure analyses of SnO2 thin film coated on Al2O3 ultrafine particles by gas phase reaction in fluidized bed
Bin Hua Ph. D.,Liyi Shi,Chunzhong Li.Morphology and structure analyses of SnO2 thin film coated on Al2O3 ultrafine particles by gas phase reaction in fluidized bed[J].Journal of Shanghai University(English Edition),1999,3(1):62-65.
Authors:Bin Hua Ph D  Liyi Shi  Chunzhong Li
Institution:1. School of Chemistry and Chemical Engineering, Shanghai University
2. Institute of Technical Chemistry and Physics, East China University of Science and Technology
Abstract:Fluidized chemical vapor deposition (FCVD) technology was developed for coating SnO2 thin film on ultrafine Al2O3 particles.Transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) analyses demonstrated that SnO2 films with different structures were deposited through controlling the coating temperature, reactant concentration, etc.. Nanocrystalline SnO2 film was formed at 572.15K by gas phase reaction of SnCl4 and H2O.Electron probe microanalyser (EPMA) and energy dispersive spectrometer (EDS) analyses indicated that the distribution of nanocrystalline SnO2 over inner and outer part of the Al2O3 agglomerates was homogeneous.
Keywords:nanocrystalline film  chemical vapor deposition  fluidization
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