| Cu纳米颗粒薄膜的飞秒激光溅射实验研究 |
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| 引用本文： | 王鹏,倪晓昌,刘耿杰,李彤,王宣.Cu纳米颗粒薄膜的飞秒激光溅射实验研究[J].天津工程师范学院学报,2011,21(4). |
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| 作者姓名： | 王鹏 倪晓昌 刘耿杰 李彤 王宣 |
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| 作者单位： | 天津职业技术师范大学电子工程学院,天津,300222 |
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| 基金项目： | 国家自然科学基金资助项目，天津职业技术师范大学横向项目 |
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| 摘 要： | 实验利用飞秒脉冲激光沉积Cu纳米颗粒薄膜，获得不同激光能量时溅射Cu粒子空间分布结果，并结合Matlab、Excel和Origin等软件对这些数据进行处理分析。实验结果表明：Cu纳米颗粒的空间分布遵循Anisimov气体膨胀模型，大部分的粒子主要集中在基片与溅射源中心线附近在小立体角度（θ〈30°）范围扩散。最后，实验选取合适立体溅射角度（θ≈30°），能量密度约为0．72J／cm2时，在不同曝光时间条件下溅射Cu纳米颗粒薄膜，并采用原子力显微镜（AFM）表征了膜厚变化情形，综合分析了纳米颗粒薄膜空间沉积成膜的过程和规律，为后继数值模拟分析提供了实验验证依据。
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| 关 键 词： | 飞秒激光 脉冲激光沉积 纳米颗粒 Anisimov气体膨胀模型 |
Experimental study on Cu nanoparticle film splashed by femtosecond laser |
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| WANG Peng,NI Xiao-chang,LIU Geng-jie,LI Tong,WANG Xuan.Experimental study on Cu nanoparticle film splashed by femtosecond laser[J].Journal of Tianji University of Technology and Education,2011,21(4). |
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| Authors: | WANG Peng NI Xiao-chang LIU Geng-jie LI Tong WANG Xuan |
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| Institution: | WANG Peng1,NI Xiao-chang1,4,LIU Geng-jie1,LI Tong1,WANG Xuan1,3(1.School of Electronic Engineering,Tianjin University of Technology and Education,Tianjin 300222,China,2.Ultrafast Laser Laboratory,School of Precision Instruments and Optoelectronics Engineering,Tianjin University,Tianjin 300072,3.Coherentia CNR-INFM and Dipartimento di Scienze Fisiche,Università degli Studi di Napoli Federico II,Complesso Universitario di Monte S.Angelo,Via Cintia,I-80126 Napoli,Italy) |
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| Abstract: | The Cu nano-particle films are produced by femtosecond （fs） pulsed-laser deposition （FPLD） method in the experiment, and the spatial distribution of nano-particles （Nps） under different laser fluenee is obtained. The data are analyzed by Matlab, Excel and Origin softwares. Experimental results show that the spatial distribution of Cu Nps is also following the Anisimov gas expansion model. Most Nps are flying to a narrow tridimensional angle 0 （0 〈30 degree）, which is departing away the vertical direction of material surface. Finally, appropriate angle 0 （0~30 degree） are chosen in the experiment to deposit Cu Nps film in 0.72 J/cm2 with different deposition time, and the atomic force microscope （AFM） is used to characterize the variations of film thickness. Then, the process and rules of deposited Nps films are systemically analyzed, which will be the basis on experimental verification for further numerical sinmlation. |
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| Keywords: | fs laser PLD nano-partieles Anisimov gas expansion model |
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