A novel wide-range precision instrument for measuring three-dimensional surface topography |
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| Authors: | YANG Xu-dong CHEN Yu-rong and XIE Tie-bang |
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| Institution: | 1. School of Mechanical Engineering, Guizhou University, Guiyang 550003, P.R. China;School of Mechanical Engineering, Huazhong University of Science and Technology, Wuhan 430074, P.R. China
2. School of Mechanical Engineering, Huazhong University of Science and Technology, Wuhan 430074, P.R. China |
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| Abstract: | We developed a measuring instrument that had wide range, high precision, small measuring touch force. The instrument for three-dimensional (3D) surface topography measurement was composed of a high precision displacement sensor based on the Michelson interference principle, a 3D platform based on vertical scanning, a measuring and control circuit, and an industrial control computer. It was a closed loop control system, which changed the traditional moving stylus scanning style into a moving platform scanning style. When the workpiece was measured, the lever of the displacement sensor returned to the balanced position in every sample interval according to the zero offset of the displacement sensor. The non-linear error caused by the rotation of the lever was, therefore, very small even if the measuring range was wide. The instrument can measure the roughness and the profile size of a curved surface. |
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| Keywords: | instrument circuit surface topography measurement error wide range precision instrument displacement sensor 3D platform |
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