| 气体流量对碳纳米管制备的影响 |
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| 引用本文： | 席彩萍.气体流量对碳纳米管制备的影响[J].渭南师范学院学报,2012(6):37-39. |
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| 作者姓名： | 席彩萍 |
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| 作者单位： | 渭南师范学院物理与电气工程学院,陕西渭南,714000 |
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| 摘 要： | 采用等离子体增强化学气相沉积技术，以C2H2、H2和N2为反应气体，制备出碳纳米管薄膜．利用扫描电镜和拉曼光谱仪对其进行表征．结果表明：气体流量大小对碳纳米管薄膜的生长起着重要作用，获得定向性良好、分布均匀、密度适中的碳纳米管的合适比例是C2H2：H2：N2=30：30：10（seem）．
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| 关 键 词： | 碳纳米管 气体流量 PECVD |
The Effect of Gas Flow on the Carbon Nanotubes Synthesized |
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| XI Cai-ping.The Effect of Gas Flow on the Carbon Nanotubes Synthesized[J].Journal of Weinan Teachers College,2012(6):37-39. |
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| Authors: | XI Cai-ping |
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| Institution: | XI Cai-ping(School of Physics and Electrical Engineering,Weinan Normal University,Weinan 714000,China) |
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| Abstract: | Carbon nanotubes are obtained with acetylene,hydrogen and nitrogen as gases by a technology of plasma enhanced chemical vapor deposition.They were characterized by scanning electron microscopy(SEM) and Raman spectrometer.Experimental results show that the gas flow plays important role in the grown of carbon nanotubes and the optimum gas flow of carbon nantubes with vertical arrangement,uniform distribution and moderate density is C2H2∶ H2∶ N2=30∶ 30∶ 10. |
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| Keywords: | carbon nanotube gas flow PECVD |
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