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Aluminum nitride (AlN) thin films with high c-axis orientation have been prepared on a glass substrate with an Al bottom electrode by radio frequency (RF) reactive magnetron sputtering. Based on the analysis of Berg's hysteresis model, the improved sputtering system is realized without a hysteresis effect. A new control method for rapidly depositing highly c-axis oriented AlN thin films is proposed. The N2 concentration could be controlled by observing the changes in cathode voltage, to realize the optimum processing condition where the target could be fixed stably in the transition region, and both stoichiometric film composition and a high deposition rate could be obtained. Under a 500 W RF power of a target with a 6 cm diameter, a substrate temperature of 450 ℃, a target-substrate distance of 60 mm and a N2 concentration of 25%, AlN thin film with preferential (002) orientation was deposited at 2.3 μm/h which is a much higher rate than previously achieved. Through X-ray diffraction (XRD) analysis, the full width at half maximum (FWHM) of AlN (002) was shown to be about 0.28°, which shows the good crystallinity and crystal orientation of AlN thin film. With other parameters held constant, any increase or decrease in N2 concentration results in an increase in the FWHM of AlN. 相似文献
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研制一种以单向可控硅为核心部件,并能灵活控制抢答组数的抢答器系统。从基本原理、系统所用元器件、制作与操作步骤等方面阐述了该控制系统的设计方法。经过调试与操作,该系统运行稳定,能完成基本的抢答功能,达到预期目标,而且制作过程简单、成本较低,实用性较好,省去了单片机的复杂编程程序,并且可以随意增加抢答组数,不影响电路的稳定性。 相似文献
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This work reports on the results obtained from the application of learning environments on the basis of one integrative problem and a series of other smaller problems that limit the contents to be investigated and learned by the students. This methodology, which is a variation to traditional problem-based learning approaches, is here illustrated in terms of its application in an engineering economics course, a subject that is taught in most engineering programs. The purpose of this methodology is to improve students’ learning, which is measured through the students’ academic performance and their learning strategies, and to characterise them as a function of these variables. The results obtained after the systematic application of this methodology are positive. The surveyed students showed significant changes in the examined variables as well as in their satisfaction and motivation level, and in their commitment to learning. 相似文献
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为加深学生对现代制造技术和广义切削技术的认识与理解,将机械设计、声发射技术和传感器技术结合起来,研发了基于声发射无损检测棒料起裂时间测定教学实验平台。采用多特征参数关联分析法对下料过程中V型槽尖端起裂声发射信号进行了描述,并用峰态系数对该信号进行进一步处理,定量得到了V型槽槽深为2 mm的45~#钢棒料在低应力下料过程中的起裂时间约为24 s。该实验平台使得金属加工成型过程更加直观,不仅加深了学生对现代制造技术、切削原理与刀具等课程的认识与理解,而且提高了学生对机械加工理论的学习兴趣,达到了良好的实验教学效果。 相似文献
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Design of virtual environments for the comprehension of planetary phenomena based on students' ideas
Children enter the classroom with a wide range of misconceptions about planetary phenomena. Conventional teaching methods usually cannot overcome these difficulties, which we consider may be because of the lack of appropriate teaching aids. The purpose of the present study is the design and development of an educational virtual environment for the support of the teaching of planetary phenomena, particularly of the movements of the Earth and Sun, the day and night cycle and the change of seasons. Our interactive three-dimensional (3D) virtual environment was based on the results of an empirical study of 102 secondary school students and provides students with new experiences, personal involvement and close-up examination of the phenomena under study. Our first results after the use of the virtual environment showed that the majority of students enthused about interacting with it and modified their misconceptions concerning the day-night cycle and the change of seasons. 相似文献
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Surface acoustic wave (SAW) sensors show great promise in monitoring fast-rotating or moving machinery in manufacturing environments, and have several advantages in the measurement of temperature, torque, pressure, and strain because of their passive and wireless capability. However, very few studies have systematically attempted to evaluate the characteristics of SAW sensors in a metal environment and rotating structures, both of which are common in machine tools. Simulation of the influence of the metal using CST software and a series of experiments with an SAW temperature sensor in real environments were designed to investigate the factors that affect transmission performance, including antenna angles, orientations, rotation speeds, and a metallic plate, along with the interrogator antenna–SAW sensor antenna separation distance. Our experimental measurements show that the sensor’s optimal placement in manufacturing environments should take into account all these factors in order to maintain system measurement and data transmission capability. As the first attempt to systematically investigate the transmission characteristics of the SAW sensor used in manufacturing environment, this study aims to guide users of SAW sensor applications and encourage more research in the field of wireless passive SAW sensors in monitoring applications. 相似文献
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该文介绍了KeilC51软件作为单片机应用系统设计工具的强大功能,并以单片机为核心实现电子钟的设计为例,阐述如何借助该软件进行单片机应用系统的设计与仿真。 相似文献
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郑文斌 《宁德师专学报(自然科学版)》2007,19(2):138-140
介绍了一种以FPGA为核心,应用VHDL技术的多功能波形发生器软件和硬件的设计与实现.该系统可以产生正弦波、三角波、方波,以及编辑生成上述3种波形(同周期)的任意波形的线性组合波形,并实现幅度、频率可调. 相似文献
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《邢台职业技术学院学报》2021,(1):16-19
4C/ID模式是国际上具有广泛影响的综合性教学设计模式,注重学习的迁移。文章介绍了4C/ID模式在《沟通与表达》课程整体设计中的应用,分析了传统教学模式的问题,明确了"综合学习"的课改方向,基于实践专家调研确定了课程的综合学习任务,并应用简化条件法对学习任务类别进行了梳理和描述,可以为公共课整体设计提供有益借鉴。 相似文献
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介绍了混凝沉淀水处理实验设备的设计思想、组成结构、特点。对该设备进行了启动试验,结果表明该设备具有启动容易、完全满足教学及科研的要求。该实验设备是既可应用于教学实验又可应用于科研的一种实验设备。 相似文献
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以 3缩水甘油环氧丙基三甲氧基硅烷对玻璃基片表面进行硅烷化后 ,用下列 4种方法组装手臂分子 :①盐酸直接处理 ;②先用聚六乙二醇 ,然后用盐酸处理 ;③用乙二胺、戊二醛、乙醇胺和硼氢化钠分别处理 ;④用聚六乙二醇、乙二胺、戊二醛、乙醇胺和硼氢化钠分别处理 .用XPS(X-ray photoelectron spectroscopy)和测定接触角的方法对上述组装进行了表征 ,并用直接偶联荧光单体及合成 2 0mer寡核苷酸与带荧光的互补探针杂交的方法对上述手臂分子的合成效率及杂交效率进行了考察 .实验表明方法③组装的手臂分子得到的结果优于其他 3种方法 ,证明了手臂分子的空间效应、亲水性等性质对寡核苷酸合成和杂交存在影响 . 相似文献