Preparation and Properties of TiN_x-SiO_2 Antireflective Coatings with Print Process

1　Introduction　TiNxcoatingspossessmanygoodproperties,suchashighhardness,highmeltingpoint,abrasionresistantanderosionresistant[1,2].Ithasbeenwidelyusedasabrasionanderosionresistantlayerinthefieldsofelectronicengineering,machineryandsoon.Itisalsousedasadornmentmaterialduetoitsgoldcolor.Inthepresentpaper,TiNxisanalyzedashighindexmaterialinplaceofTiO2fortheantireflective(AR)coatings.　Forthesolgelprocess,dipandspinprocessareoftenusedtopreparecoatings.Inthispaper,printprocess,traditionallyuse…     

Preparation and Properties of TiNx-SiO2 Antireflective Coatings with Print Process

This paper describes the preparation and properties of TiNx-SiO2 double-layered antireflective(AR) coatings that were applied with print process. The coating material was analyzed and TiNx was used instead of TiO2 as high refractive material. The influence of solution concentration on AR property was studied. The testing result shows that the coatings using print process are featured with excellent mechanical property and the AR property is comparable to American Southwall AR product. It is expected that the study would promote the industrialization progress in AR coatings.