| LEO-1450扫描电镜一种真空故障的排除 |
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| 引用本文： | 崔凤娥,边建华. LEO-1450扫描电镜一种真空故障的排除[J]. 实验技术与管理, 2007, 24(3): 37-38 |
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| 作者姓名： | 崔凤娥 边建华 |
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| 作者单位： | 北京科技大学,材料学院,北京,100083 |
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| 摘 要： | 扫描电子显微镜观察和X射线微区分析是近年来迅速发展起来的一项重要的分析技术。真空是电镜工作的一个最基本的保障,真空系统出现故障,则整个设备便处于瘫痪状态。该文主要描述了真空压力传感器Penn ing规管污染造成真空系统故障的表现及其解决方法。
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| 关 键 词： | 扫描电镜 真空故障 诊断与排除 |
| 文章编号： | 1002-4956（2007）03-0037-02 |
| 收稿时间： | 2006-09-12 |
| 修稿时间： | 2006-11-22 |
Solution to a vacuum problem in LEO-1450 scanning electronic microscope |
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| CUI Feng-e,BIAN Jian-hua. Solution to a vacuum problem in LEO-1450 scanning electronic microscope[J]. Experimental Technology and Management, 2007, 24(3): 37-38 |
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| Authors: | CUI Feng-e BIAN Jian-hua |
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| Affiliation: | School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China |
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| Abstract: | Scanning electronic microscope(SEM) attached with related energy dispersion analysis is an important one in analysis techniques developed in recent years. Vacuum is a primary condition for ensuring the normal operation of SEM.If there was a problem in vacuum system,SEM should not be started.The behavior and its solution of a vacuum problem resulted from contamination of the pressure sensor,Penning gauge,was provided in this paper. |
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| Keywords: | SEM vacuum problem diagnosis and solution |
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