| 基于神经网络的半导体扩散炉温度控制研究 |
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| 引用本文： | 蔡兵.基于神经网络的半导体扩散炉温度控制研究[J].河西学院学报,2005,21(2):25-26. |
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| 作者姓名： | 蔡兵 |
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| 作者单位： | 湖北襄樊学院物理系,湖北,襄樊,441053 |
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| 摘 要： | 针对半导体扩散炉温度控制问题,提出神经网络控制方法.神经网络采用3-3-3结构.仿真表明,此控制方法是可行的,具有良好的控制品质.
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| 关 键 词： | 半导体扩散炉 神经网络 温度控制 |
Study on Temperature Control of Semiconductor Diffuse Furnace Based on NN |
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| CAI Bing.Study on Temperature Control of Semiconductor Diffuse Furnace Based on NN[J].Journal of Hexi University,2005,21(2):25-26. |
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| Authors: | CAI Bing |
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| Abstract: | According to the problem of temperature control of semiconductor diffuse furnace, an new control approach is described in the paper, such as NN. the NN construct is 3-3-3,simulation results show that the control method has high quality. |
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| Keywords: | Semiconductor Diffuse Kiln NN Temperature Control |
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