| Excimer紫外灯辐照法钽氧化物膜XPS分析 |
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| 引用本文： | 别利剑,尹静,彭菲,李春艳.Excimer紫外灯辐照法钽氧化物膜XPS分析[J].临沂师范学院学报,1998(3). |
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| 作者姓名： | 别利剑 尹静 彭菲 李春艳 |
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| 作者单位： | 临沂师专化学系(别利剑)，临沂粮食学校(尹静)，苍山县第一中学(彭菲)，苍山县实验中学(李春艳) |
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| 摘 要： | 报道了利用新型紫外光源—Ｅｘｃｉｍｅｒ紫外灯辐照制备钽氧化物薄膜的新方法，并对所制备的薄膜进行了Ｘ光光电子能谱（ＸＰＳ）分析，分析结果表明：所制备的钽氧化物薄膜不含碳而且符合化学计量比，有望获得好的介电性能
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| 关 键 词： | 溶胶－凝胶法 钽氧化物薄膜 Excimer紫外灯 |
XPS Analysis of Tantalum Pentoxide Thin Films Formed by Using Excimer UV Lamp |
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| Bie Lijian.XPS Analysis of Tantalum Pentoxide Thin Films Formed by Using Excimer UV Lamp[J].Journal of Linyi Teachers' College,1998(3). |
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| Authors: | Bie Lijian |
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| Abstract: | Thin tantalum oxide films have been formed on silicon substrates from tantalum ethoxide sol gel solutions at low temperature using 172 nm radiation from a novel Xe 2 * excimer lamp. Elemental analysis of the tantalum pentoxide films deposited was carried out by X ray photospectroscopy (XPS), the results showed that no carbon in the film was observed and the O/Ta ratio is very close to the stoichiometric ratio of 2.5 for Ta 2O 5. |
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| Keywords: | Sol gel method Tantalum pentoxide film Excimer lamp |
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