| 微波对n型硅半导体材料中PN结扩散的加速作用 |
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| 引用本文： | 史尚钊,孟繁萍.微波对n型硅半导体材料中PN结扩散的加速作用[J].洛阳工业高等专科学校学报,1997(3). |
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| 作者姓名： | 史尚钊 孟繁萍 |
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| 作者单位： | 洛阳工业高等专科学校材料工程系(史尚钊)，洛阳市半导体二厂(孟繁萍) |
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| 摘 要： | 用微波加热方法进行了硼—铝杂质在n型硅半导体材料中扩散PN结的试验。并与现行工业扩散的结果作了对比。从而发现,微波加热方法可以把扩散速度加快三倍以上。
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| 关 键 词： | 微波加热 半导体 扩散 |
Accelerating Effects of Microwave Energy on Diffusing PN Junction in n-Type Silicon Semiconductors |
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| Shi Shangzhao,Meng Fanping.Accelerating Effects of Microwave Energy on Diffusing PN Junction in n-Type Silicon Semiconductors[J].Journal of Luoyang Technology College,1997(3). |
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| Authors: | Shi Shangzhao Meng Fanping |
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| Institution: | Shi Shangzhao Meng Fanping |
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| Abstract: | Experiments on diffusing PN junction in n-type semiconductors with microwave energy were carried out. By camparing the results with those of conventionally diffused samples,it was found that microwave energy has the ablity of accelerating the process to over three times. |
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| Keywords: | microwave heating semiconductors diffusion |
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