类金刚石薄膜/HgCdTe晶体界面应力的有限元分析 |
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引用本文: | 居建华,夏义本,张伟丽,余璐,王林军,史伟民.类金刚石薄膜/HgCdTe晶体界面应力的有限元分析[J].上海大学学报(英文版),2001,4(Z1). |
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作者姓名: | 居建华 夏义本 张伟丽 余璐 王林军 史伟民 |
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摘 要: |
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Study on the Stress of DLC/MCT Interface by Finite Element Method |
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Institution: | School of Material Science and Engineering, Shanghai UniversiW, |
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Abstract: | Micro-indention and finite element method (FEM) are used to study the stress at the interface between diamond-like carbon
(DLC) film and mercury cadmium telluride (MCT) substrate, with different coating thickness, deposition temperature and indention load.
The FEM simulation results show that when Young's modulus ratio of the coating to the substrate Ec/Es
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