Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump |
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Authors: | Email author" target="_blank">Xie?Hai-boEmail author Fu?Xin Yang?Hua-yong |
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Institution: | (1) The State Key Laboratory of Fluid Power Transmission & Control, Zhejiang University, 310027 Hangzhou, China |
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Abstract: | The structure and operating principle of micro valveless pump were investigated theoretically and experimentally. The mathematical
model of pressure and flow rate within the micro nozzle/diffuser was established to analyze the effects of nozzle/diffuser
parameters on the output flow rate of the micro valveless pump. The experiments were carried out with different structural
parameters, driving frequencies, vibration amplitudes and stiffness of the driving diaphragms. Effects of the structural parameters
and driving conditions on the operation performance of the pump are discussed in detail. The work provides useful reference
for structure optimization selection of the driving diaphragm of micro valveless pump.
Project supported by National Natural Science Foundation of China (Nos. 50175098, 59835160) |
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Keywords: | Micro valveless pump MEMS Driving diaphragm Optimal design |
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