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Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump
Authors:Email author" target="_blank">Xie?Hai-boEmail author  Fu?Xin  Yang?Hua-yong
Institution:(1) The State Key Laboratory of Fluid Power Transmission & Control, Zhejiang University, 310027 Hangzhou, China
Abstract:The structure and operating principle of micro valveless pump were investigated theoretically and experimentally. The mathematical model of pressure and flow rate within the micro nozzle/diffuser was established to analyze the effects of nozzle/diffuser parameters on the output flow rate of the micro valveless pump. The experiments were carried out with different structural parameters, driving frequencies, vibration amplitudes and stiffness of the driving diaphragms. Effects of the structural parameters and driving conditions on the operation performance of the pump are discussed in detail. The work provides useful reference for structure optimization selection of the driving diaphragm of micro valveless pump. Project supported by National Natural Science Foundation of China (Nos. 50175098, 59835160)
Keywords:Micro valveless pump  MEMS  Driving diaphragm  Optimal design
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