| Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump |
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| 引用本文： | 谢海波,傅新,杨华勇. Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump[J]. Journal of Zhejiang University. Science. B, 2003, 0(1) |
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| 作者姓名： | 谢海波 傅新 杨华勇 |
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| 作者单位： | The State Key Laboratory of Fluid Power Transmission & Control，Zhejiang University，The State Key Laboratory of Fluid Power Transmission & Control，Zhejiang University，The State Key Laboratory of Fluid Power Transmission & Control，Zhejiang University Hangzhou 310027，China，Hangzhou 310027，China，Hangzhou 310027，China |
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| 基金项目： | ProjectsupportedbyNationalNaturalScienceFoundationofChina (Nos .5 0 175 0 98，5 983 5 160 ) |
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| 摘 要： | ＩＮＴＲＯＤＵＣＴＩＯＮＴｈｅｍｉｃｒｏｐｕｍｐｉｓｋｅｙｃｏｍｐｏｎｅｎｔｏｆｍｉｃｒｏｆｌｕｉｄｉｃｓｙｓｔｅｍ .Ｔｈｅｉｎｔｅｇｒａｔｉｏｎｏｆｍｉｃｒｏｐｕｍｐｗｉｔｈｏｔｈｅｒｍｉｃｒｏｆｌｕｉｄｉｃｃｏｍｐｏｎｅｎｔｓｃａｎｂｅｗｉｄｅ ｌｙｕ
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Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump |
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| XIE Hai bo,FU Xin,YANG Hua yong[WT.,.BZ]. Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump[J]. Journal of Zhejiang University. Science. B, 2003, 0(1) |
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| Authors: | XIE Hai bo FU Xin YANG Hua yong[WT. .BZ] |
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| Affiliation: | XIE Hai bo,FU Xin,YANG Hua yong[WT9.,10.BZ] |
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| Abstract: | The structure and operating principle of micro valveless pump were investigated theoretically and experimentally. The mathematical model of pressure and flow rate within the micro nozzle/diffuser was established to analyze the effects of nozzle/diffuser parameters on the output flow rate of the micro valveless pump. The experiments were carried out with different structural parameters, driving frequencies, vibration amplitudes and stiffness of the driving diaphragms. Effects of the structural parameters and driving conditions on the operation performance of the pump are discussed in detail. The work provides useful reference for structure optimization selection of the driving diaphragm of micro valveless pump. |
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| Keywords: | Micro valveless pump MEMS Driving diaphragm Optimal design |
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