| 阴影效应对柱状薄膜生长影响的动力学蒙特卡罗模拟 |
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| 引用本文： | 陈书汉. 阴影效应对柱状薄膜生长影响的动力学蒙特卡罗模拟[J]. 嘉应学院学报, 2011, 29(11): 32-35 |
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| 作者姓名： | 陈书汉 |
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| 作者单位： | [1]嘉应学院物理与光信息科技学院,广东梅州514015;[2]中山大学光电材料与技术国家重点实验室,广州510275 |
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| 基金项目： | 基金项目:国家自然科学基金资助项目 |
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| 摘 要： | 建立了弹道入射的薄膜三维蒙特卡罗形貌仿真模型,模拟了倾斜沉积情况下柱状薄膜的生长形貌,研究了沉积角度对柱状薄膜形貌的影响.通过动力系蒙特卡罗模拟,分析了雕塑薄膜生长过程中的阴影效应,并且验证了在倾斜沉积实验条件下,斜柱状薄膜生长模式的稳定性,这为后续准确控制雕塑薄膜结构并实现量化控制提供重要的理论依据.
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| 关 键 词： | 柱状薄膜 动力学蒙特卡罗 倾斜沉积法 |
Kinetic Monte Carlo Simulations for the Shadowing Effect on the Grow of Columnar Thin Films |
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| Affiliation: | CHEN Shu - han ( 1. School of Physics and Optical Information Sciences, Jiaying University, Meizhou 514015, China; 2. State Key Laboratory of Optoelectronic Materials and Technologies, Sun Yat - sen University, Guangzhou 510275, China) |
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| Abstract: | A three- dimensional kinetic Monte Carlo simulation model has been developed. Using this model, we explore the growth process during glancing angle deposition with different incidence angles. Shadowing effect de- pendence of growth morphology is discussed. Furthermore, we demonstrate the stability of the columnar growth model when the coverage is increased. These resuhs will provide a theoretically guide for the precise control of columnar thin films during experiment. |
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| Keywords: | columnar thin films Kinetic Monte Carlo glancing angle deposition |
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