| TCAD技术在微电子实验教学体系中的应用与研究 |
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| 引用本文： | 刘剑霜,郭鹏飞,李伙全.TCAD技术在微电子实验教学体系中的应用与研究[J].实验技术与管理,2012,29(2):78-80. |
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| 作者姓名： | 刘剑霜 郭鹏飞 李伙全 |
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| 作者单位： | 扬州大学物理科学与技术学院,江苏扬州,225002 |
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| 基金项目： | 扬州大学自然科学基金资助项目，扬州大学教改基金资助项目 |
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| 摘 要： | 针对传统微电子专业实验设备昂贵、实验周期长、效果不理想等缺点,提出了一种通过半导体工艺和器件的计算机辅助技术(TCAD)进行虚拟实验教学的方法。该方法速度快,可以在实验前后和过程中,直接观察材料和器件的形貌和内外参数,是对理论课程的实践和扩充。介绍了合理安排实验规划方案和解决实施中遇到问题的思路。
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| 关 键 词： | TCAD技术 微电子实验教学 虚拟实验 |
Research and application of technology CAD in microelectronic experimental teaching system |
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| Liu Jianshuang
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Guo Pengfei
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Li Huoquan.Research and application of technology CAD in microelectronic experimental teaching system[J].Experimental Technology and Management,2012,29(2):78-80. |
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| Authors: | Liu Jianshuang Guo Pengfei Li Huoquan |
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| Institution: | (School of Physics Science and Technology,Yangzhou University,Yangzhou 225002,China) |
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| Abstract: | A teaching method using virtual experiments based on technology computer aided design(TCAD) is presented to overcome the problems of conventional microelectronic experimental teaching,such as expensive equipment,long experiment time and unsatisfactory effects.The students can obtain the inner and outer parameters of the materials or devices at any time of experiment.This article also discusses how to layout the experiments rationally and solve the difficulties of teaching. |
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| Keywords: | technology CAD microelectronic experimental teaching virtual experiments |
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