| 双稳态电磁型微驱动器的研制 |
| |
| 引用本文： | 张永华,丁桂甫,孙晓峰,蔡炳初.双稳态电磁型微驱动器的研制[J].上海大学学报(英文版),2006,10(6):541-546. |
| |
| 作者姓名： | 张永华 丁桂甫 孙晓峰 蔡炳初 |
| |
| 作者单位： | Film and Microfabrication Key Laboratory under the Ministry of Education Institute of Micro/Nanometer Science and Technology Shanghai Jiaotong University，Film and Microfabrication Key Laboratory under the Ministry of Education Institute of Micro/Nanometer Science and Technology Shanghai Jiaotong University，Film and Microfabrication Key Laboratory under the Ministry of Education Institute of Micro/Nanometer Science and Technology Shanghai Jiaotong University，Film and Microfabrication Key Laboratory under the Ministry of Education Institute of Micro/Nanometer Science and Technology Shanghai Jiaotong University，Shanghai 200030 P.R. China Shanghai 200030 P.R. China Shanghai 200030 P.R. China Shanghai 200030 P.R. China |
| |
| 基金项目： | Projece supported by National Natural Science Foundatin ofChina(Grant No .10377009)，National High-Technology Researchand Development Program(Grant No .863 -2003AA404140)，Science Foundation of National Information Industry Ministry ofChina(Grant No .41308050116) |
| |
| 摘 要： | 1 Introduction Microactuators are the key devices of micro-electro-mechanical system( MEMS) . For many MEMS devicessuch as switches , optical attenuators , pumps andvalves to function, microactuators are required . Mo-tion of microactuators can be achieved by several kindsof actuation mechanisms . Electrostatic ,piezoelectric ,magnetostrictive, magnetic ,thermomechanical actua-tors have been reported1-5].Among the different actu-ation principles ,the electrostatic actuationis predomi-nant…
|
| 关 键 词： | 双稳态电磁执行器 微机电系统 微执行器 UV-LIGA技术 执行机构 |
| 文章编号： | 1007-6417（2006）06-0541-06 |
| 收稿时间： | 2005-04-21 |
| 修稿时间： | 2005-10-08 |
Design and fabrication of a bistable electromagnetic microactuator |
| |
| Yong-hua Zhang Ph. D. Candidate,Gui-fu Ding,Xiao-feng Sun,Bing-chu Cai.Design and fabrication of a bistable electromagnetic microactuator[J].Journal of Shanghai University(English Edition),2006,10(6):541-546. |
| |
| Authors: | Yong-hua Zhang Ph D Candidate Gui-fu Ding Xiao-feng Sun Bing-chu Cai |
| |
| Institution: | Film and Microfabrication Key Laboratory under the Ministry of Education, Institute of Micro/ Nanometer Science and Technology,Shanghai Jiaotong University, Shanghai 200030, P.R. China |
| |
| Abstract: | An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two
free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The cantilever beam has two stable positions
due to the use of permanent magnets. With electromagnetic actuation arising from the planar coils, the cantilever beam will
switch from one stable position to the other. Mechanical and magnetic analysis are carried out on the actuator, and the device
with a size of 2.2 mm×2.5 mm is fabricated with the UV-LIGA technology. The test results show that a current pulse with an
amplitude of 70 mA is needed for actuator’s switching between the two stable states, and the switching time is no more than
6 ms. Displacement of the end of cantilever is about 15 μm.
Projece supported by National Natural Science Foundatin of China(Grant No. 10377009), National High-Technology Research and
Development Program(Grant No. 863 - 2003AA404140), and Science Foundation of National Information Industry Ministry of China(Grant
No. 41308050116) |
| |
| Keywords: | micro-electromechanical system(MEMS) microactuator bistable electromagnetic actuation UV-LIGA technology |
| 本文献已被 CNKI 万方数据 SpringerLink 等数据库收录！ |
