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非晶硅薄膜电池AZO背反射电极的制备与机理研究
引用本文:徐祥福. 非晶硅薄膜电池AZO背反射电极的制备与机理研究[J]. 茂名学院学报, 2011, 21(4): 28-30
作者姓名:徐祥福
作者单位:广东石油化工学院理学院,广东茂名,525000
摘    要:采用直流脉冲磁控溅射方法在非晶硅薄膜上制备AZO背反电极,比较不同制备参数对透过率及效率的影响。采用优化参数,得到效率增加了0.8%的非晶硅薄膜电池。根据实验结果,证明背反电极增反机理不是薄膜干涉增强原理,而是因为界面共振吸收减少,而导致光的吸收增强的机理。

关 键 词:铝掺杂氧化锌  脉冲直流  薄膜太阳能电池

The Preparation of AZO Back Reflector of Amorphous Silicon Solar Cell
XU Xiang-fu. The Preparation of AZO Back Reflector of Amorphous Silicon Solar Cell[J]. Journal of Maoming College, 2011, 21(4): 28-30
Authors:XU Xiang-fu
Affiliation:XU Xiang-fu(College of Science,Guangdong University of Petrochemical Technology,Maoming 525000,China)
Abstract:The AZO back reflector was prepared by DC pulse magnetron sputtering method,by comparing with different fabrication parameters to find the influence to transmittance and conversion efficiency.With optimized parameters,the efficiency of the amorphous silicon solar cell increased by 0.8%.The back reflector mechanism is proved not to be the film interference theory but the interface resonance absorption,in which the light absorption is enhanced when the back reflector is applied.
Keywords:AZO  DC pulse magnetron sputtering  amorphous silicon thin film solar cell  
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