多层介质高反膜理论设计与光学特性分析

用膜系设计软件Essential Macloed,模拟多孔介质薄膜,用堆积密度的概念模拟了溶胶-凝胶法制备的纳米多孔薄膜的折射率;利用反射率增幅分析和膜层制备难度分析来选择理想的膜系设计;通过计算分析了经典四分之一波长膜系的光学特性,为多层高反膜的化学法制备与实际应用提供了重要依据.

Design and Analysis of Sol Gel HR Multi Layer Coatings

Optical coatings which were perpared by chemical process have the porous structure. The desigen of optical HR multi-coating were made by Essential Macloed program and the concept (Packing Density) was used to modify the porous coatings, and it is also a convenient way of introducing variable refractive index. The best design was chosen by the Reflectance and Relative Sensitivity analysis. Optical performance of quarter-wave layer HR coatings was calculated such as reflectance variation with the incident angle, the influence of thickness errors to the reflectivity etc. These results can give good guides to the coating preparation.