微机电系统性能检测的分析与研究

微机电系统是一种集微电子电路和微机械致动器的微小器件,微传感器的性能检测可通过对系统输入量和输出量的检测,选择合适的测试仪器和测试方法来实现.根据角频率的推导,采用频率响应方法,其结果比通过传递函数数值分析得到的谐振角频率精确得多.

Approaches to the Performance on Micro Mechanical and Electrical System

Micro mechanical and electrical system is a kind of micro unit which consists of micro electrical circuits and micro machine - driven devices. The performance test of its micro sensor can be done by way of the number of the systems input and output amounts, proper testing instruments and proper methods. According to the derivation of the angle frequency and by the frequency - answer method, the result is that the resonant angle frequency is much accurate than the one obtained by conveying analysis of the functional numerical value.