| MEMS Test System Based on Virtual Instrument Technology |
| |
| 作者姓名： | 胡晓东 栗大超 郭彤 胡春光 胡小唐 |
| |
| 作者单位： | State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，State Key Laboratory of Precision Measuring Technology and Instruments Tianjin University，Tianjin 300072 China，Tianjin 300072 China，Tianjin 300072 China，Tianjin 300072 China，Tianjin 300072 China |
| |
| 基金项目： | 国家自然科学基金;天津市自然科学基金;教育部高校新世纪杰出人才项目 |
| |
| 摘 要： | On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 μm and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively.
|
| 关 键 词： | 虚拟仪表技术 MEMS 试验系统 光学测量 微机电技术 |
| 收稿时间： | 2006-07-18 |
MEMS Test System Based on Virtual Instrument Technology |
| |
| HU Xiaodong,LI Dachao,GUO Tong,HU Chunguang,HU Xiaotang.MEMS Test System Based on Virtual Instrument Technology[J].Transactions of Tianjin University,2007,13(2):88-92. |
| |
| Authors: | HU Xiaodong LI Dachao GUO Tong HU Chunguang HU Xiaotang |
| |
| Abstract: | On account of the multiformity of MEMS devices, it is necessary to integrate with some optical measurement techniques for meeting static and dynamic unit test requirements. In this paper, an automated MEMS test system is built of some commercially available components and instruments based on virtual instrument technology. The system is integrated with stroboscopic imaging, computer micro-vision, microscopic Mirau phase shifting interferometry, and laser Doppler vibrometer, and is used for the measurement of full-view in-plane and out-of-plane geometric parameters and periodical motions and single spot out-of-plane transient motion. The system configuration and measurement methods are analyzed, and some applications of the measurement of in-plane and out-of-plane dimensions and motions were described. The measurement accuracy of in-plane dimensions and out-of-plane dimensional is better than 0.2 um and 5 nm respectively. The resolution of measuring in-plane and out-of-plane motions is better than 15 nm and 2 nm respectively. |
| |
| Keywords: | MEMS optical measurement technique stroboscopic imaging virtual instrument dynamic test |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
