Novel method for detection of anomalous structure characteristics of ID precision ultrathin monocrystalline silicon section cutting tool |
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| Authors: | Zong-nong Chen Ming Guo Qing-jiu Wang Xue-gong Yu |
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| Institution: | 1.Department of Mechanical Engineering,Zhejiang University,Hangzhou,China;2.National High-Purity Silicon & Silicane Key Lab,Zhejiang University,Hangzhou,China |
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| Abstract: | The structure characteristics of ID precision ultrathin monocrystalline silicon section cutting machine-tool spindle with force-monitoring bearings functioning as force measuring sensors were detected with the new Hilbert theory based signal-wave envelope detection method, presented to replace the conventional hardware device in order to ensure that the signal is measured online with high fidelity. According to the probability of anomalous incidents in the cutting process, a mathematical recognition model has been designed and verified on an STC-22ID machine. |
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| Keywords: | Machine-tool spindle Bearing Monocrystalline silicon section Signal analysis |
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