| 钛酸系铁电薄膜制备技术适用性的研究 |
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| 引用本文： | 黄文波,王敏. 钛酸系铁电薄膜制备技术适用性的研究[J]. 广东技术师范学院学报, 2011, 0(6): 5-10 |
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| 作者姓名： | 黄文波 王敏 |
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| 作者单位： | 华南理工大学;广东技术师范学院; |
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| 基金项目： | 中国博士后科学基金特别资助项目(200902317) |
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| 摘 要： | 钛酸系铁电薄膜是铁电薄膜中最重要的一类,其制备技术繁多.虽然很多文献对各种制备技术的优缺点有所论述,对于其适用性则未有全面的分析.本文结合钛酸系铁电薄膜的化学成分特点,对主要的铁电薄膜制备技术进行分类,通过比较分析各种技术的特点,讨论这些技术在实验室基础研究、商业化生产、军工或高附加值产品制备这三方面的适用性,可为铁电薄膜制备技术研究人员在技术选用、方向把握方面提供参考.
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| 关 键 词： | 铁电薄膜 制备技 适用性 钛酸盐 |
Study on Applicability of Deposition Technologies of Titanate Ferroelectric Thin Films |
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| Huang Wenbo Wang Min. Study on Applicability of Deposition Technologies of Titanate Ferroelectric Thin Films[J]. Journal of Guangdong Polytechnic Normal University, 2011, 0(6): 5-10 |
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| Authors: | Huang Wenbo Wang Min |
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| Affiliation: | Huang Wenbo1 Wang Min2(1.South China University of Technology,Guangzhou 510640,China,2.Guangdong Polytechnic Normal University,Guangzhou 510665,China) |
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| Abstract: | Of all the present ferroelectric thin films,titanate is the most important kind.Many deposition technologies have been successfully developed.Although the advantages and disadvantages of these technologies were widely commented in many articles,the comprehensive discussion on their applicability remained blank.Taking into account of thin films' chemical composition,most deposition technologies of titanate ferroelectric thin films were categorized and their characteristics were compared in this article.Discu... |
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| Keywords: | ferroelectric thin film deposition applicability titanate |
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