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Preparation and Properties of TiN_x-SiO_2 Antireflective Coatings with Print Process
作者姓名:姚丽峰  丁益民  郭景康
作者单位:Department of Chemistry,College of Sciences,Shanghai University,Shanghai 200444,P.R. China,Department of Chemistry,College of Sciences,Shanghai University,Shanghai 200444,P.R. China,Department of Chemistry,College of Sciences,Shanghai University,Shanghai 200444,P.R. China
摘    要:1 Introduction TiNxcoatingspossessmanygoodproperties,suchashighhardness,highmeltingpoint,abrasionresistantanderosionresistant1,2].Ithasbeenwidelyusedasabrasionanderosionresistantlayerinthefieldsofelectronicengineering,machineryandsoon.Itisalsousedasadornmentmaterialduetoitsgoldcolor.Inthepresentpaper,TiNxisanalyzedashighindexmaterialinplaceofTiO2fortheantireflective(AR)coatings. Forthesolgelprocess,dipandspinprocessareoftenusedtopreparecoatings.Inthispaper,printprocess,traditionallyuse…


Preparation and Properties of TiN_x-SiO_2 Antireflective Coatings with Print Process
YAO Li-feng,DING Yi-min,GUO Jing-kang.Preparation and Properties of TiN_x-SiO_2 Antireflective Coatings with Print Process[J].Journal of Shanghai University(English Edition),2005(1).
Authors:YAO Li-feng  DING Yi-min  GUO Jing-kang
Institution:YAO Li-feng,DING Yi-min,GUO Jing-kang Department of Chemistry,College of Sciences,Shanghai University,Shanghai 200444,P.R. China
Abstract:This paper describes the preparation and properties of TiN_x-SiO_2 double-layered antireflective(AR) coatings that were applied with print process. The coating material was analyzed and TiN_x was used instead of TiO_2 as high refractive material. The influence of solution concentration on AR property was studied. The testing result shows that the coatings using print process are featured with excellent mechanical property and the AR property is comparable to American Southwall AR product. It is expected that the study would promote the industrialization progress in AR coatings.
Keywords:TiN_x  print process  AR coatings  
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