两种光学薄膜反射系数计算方法的对比

该文介绍了两种光学薄膜反射系数的计算方法——等效界面法和导纳矩阵法,并比较了两种方法在多层光学薄膜结构下的反射率和相位差计算结果.发现当计算数值有效位数为15时,两种方法的反射率和相位差结果差异分别为10-15量级和10-14rad量级,远小于反射率和相位差的测量分辨率,可以认为两者的结果相同.这说明两个基于相同理论基础的方法,计算结果也是相同的,并通过实验证实了计算结果的可靠性.

The Comparison of Two Calculated Methods for the Reflection Coefficient of Optical Films

Two methods,the equivalent interface method and the admittance matrix method,are introduced to calculate the reflection coefficient of optical films,and the calculated results of the reflectivity and phase difference of the optical films with many layers are compared.It is found that when the effective digits of the calculated value is15,the differences of the two methods＇ calculated reflectivity and phase difference are 10-15 order and 10-14 rad order respectively,far less than their measured resolution.Therefore,their results can be considered as the same.The calculated reflectivity of the two methods can also be thought the same while the effective digit of the calculated value is greater than 5,whatever for p-light and s-light.This indicates that the two methods which are based on the same theory have the same calculated result.In particular,the reliability of the calculated results is confirmed by an experiment.