| 脉冲激光沉积ZnO薄膜动力学过程模拟 |
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| 作者单位： | 江西蓝天学院 江西南昌330098 |
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| 摘 要： | 利用有限差分法对脉冲激光沉积(PLD)技术制备ZnO薄膜过程中等离子体在等温和绝热两个阶段的速度演化进行了模拟,并给出了其中主要粒子在空间的具体演化规律,对等离子体在空间膨胀的物理机制,进行了深入的讨论。
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| 关 键 词： | 脉冲激光沉积等 离子体羽辉 差分模拟 粒子速度 ZnO薄膜 |
Simulation of the Dynamics Process of Pulsed Laser Deposition of ZnO Thin Film |
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| Authors: | HU Chun-xiang WU Yu-zhi |
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| Abstract: | With finite difference method,the evolvement of plasma generated by a pulsed laser is studied for pulsed laser deposition of ZnO thin film.This article researches the movement of particle in plasma in isothermal and adiabatic expansion stages.At the same time,the author also simulates the change of plasma at different times.Moreover,the physics mechanism in expansion of the plasma has been explained. |
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| Keywords: | pulsed laser deposition plasma difference simulation velocity particle ZnO thin film |
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