In situ growth of large-area and self-aligned graphene nanoribbon arrays on liquid metal |
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Authors: | Le Cai Wanzhen He Xudong Xue Jianyao Huang Ke Zhou Xiahong Zhou Zhiping Xu Gui Yu |
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Institution: | Beijing National Laboratory for Molecular Sciences, CAS Research/Education Centre for Excellence in Molecular Sciences, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China;School of Chemical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China;Applied Mechanics Laboratory, Department of Engineering Mechanics and Centre for Nano and Micro Mechanics, Tsinghua University, Beijing 100084, China |
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Abstract: | Intrinsic graphene features semi-metallic characteristics that limit its applications in electronic devices, whereas graphene nanoribbons (GNRs) are promising semiconductors because of their bandgap-opening feature. However, the controllable mass-fabrication of high-quality GNR arrays remains a major challenge. In particular, the in situ growth of GNR arrays through template-free chemical vapor deposition (CVD) has not been realized. Herein, we report a template-free CVD strategy to grow large-area, high-quality and self-aligned GNR arrays on liquid copper surface. The width of as-grown GNR could be optimized to sub-10 nm with aspect ratio up to 387, which is higher than those of reported CVD-GNRs. The study of the growth mechanism indicates that a unique comb-like etching-regulated growth process caused by a trace hydrogen flow guides the formation of the mass-produced self-aligned GNR arrays. Our approach is operationally simple and efficient, offering an assurance for the use of GNR arrays in integrated circuits. |
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Keywords: | graphene nanoribbons template-free chemical vapor deposition comb-like etching self-alignment in situ growth |
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