| 磁激活增强等离子体化学气相沉积设备的研制 |
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| 引用本文： | 劳晓东,刘欣杰,韩会民,周俊敏.磁激活增强等离子体化学气相沉积设备的研制[J].周口师范学院学报,2007,24(5):64-66. |
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| 作者姓名： | 劳晓东 刘欣杰 韩会民 周俊敏 |
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| 作者单位： | 1. 周口师范学院,物理与电子工程系,河南,周口,466001
2. 大连理工大学,材料科学与工程学院,辽宁,大连,116023 |
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| 摘 要： | 针对PECVD中等离子体的密度沿径向分布均匀性较差、空间气氛化学活性较差的问题，在PECVD的基础上加入电子发射源和正交电磁场以控制电子的运动，从而增强等离子场的强度和范围，使反应场的活力增加，以提高反应空间的活化能力，继而提高膜层质量.结果表明，该方法可以使等离子场的分布发生改变，可控制、调整等离子体密度及范围.
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| 关 键 词： | 磁激活 等离子体化学气相沉积 设备 |
| 文章编号： | 1671-9476（2007）05-0064-03 |
| 修稿时间： | 2007-05-152007-06-25 |
Study on device of magneto-active PECVD |
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| LAO Xiao-dong,LIU Xin-jie,HAN Hui-min,ZHOU Jun-min.Study on device of magneto-active PECVD[J].Journal of Zhoukou Normal University,2007,24(5):64-66. |
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| Authors: | LAO Xiao-dong LIU Xin-jie HAN Hui-min ZHOU Jun-min |
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| Institution: | 1.Department of Physics, Zhoukou Normal University , Zhoukou466001 ,China; 2. Department of Materials Science trod Engineering , Dalian University of Technology, Dalian 116023,China |
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| Abstract: | The drawback of PECVD is that the density of plasma attenuated rapidly along the radial distribution. So it requires a more sophisticated rector to control the plasma. A new style of PECVD device has been designed and manufactured, which is composed of electron emission and quadrature electric-magnetic field to restrict the electronic movement and enhance the density of plasma. The resuhs indicate that field of plasma is changed, and the density of plasma can be controlled and adjusted. |
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| Keywords: | magneto-active PECVD device |
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