| 掺铝氧化锌薄膜的湿化学腐蚀特性研究 |
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| 引用本文： | 范丽琴,赖发春.掺铝氧化锌薄膜的湿化学腐蚀特性研究[J].福建师大福清分校学报,2013(2):63-68. |
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| 作者姓名： | 范丽琴 赖发春 |
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| 作者单位： | 1. 华侨大学厦门工学院,福建厦门 361021
2. 福建师范大学物理与光电信息科技学院,福建福州 350007 |
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| 摘 要： | 利用射频磁控溅射制备AZO薄膜,然后在常温下0.1%的盐酸水溶液中对薄膜进行化学腐蚀,系统研究了腐蚀时间长短对薄膜的表面形貌和光电学性质的影响。结果表明,薄膜表面的粗糙度和方块电阻随腐蚀时间的增加而增大;薄膜的光学透射率和反射率均随腐蚀时间的增加而减小。
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| 关 键 词： | 透明导电膜 掺铝氧化锌 磁控溅射 光电学性质 |
Study on the Wet Chemical Etching Property of AZO(ZnO:AL) Film |
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| FAN Liqin,LAI Fachun.Study on the Wet Chemical Etching Property of AZO(ZnO:AL) Film[J].Journal of Fuqing Branch of Fujian Normal University,2013(2):63-68. |
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| Authors: | FAN Liqin LAI Fachun |
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| Institution: | 1.School of Xiamen Institute of Technology Huqiao University,Xiamen,Fujian,361021 2.School of Physics and Optoelectronics Technology,Fujian Normal University,Fuzhou Fujian,350007) |
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| Abstract: | The morphology,microstructure,optical and electrical properties of AZO films etched by hydrochloric Acid with different time have been investigated.AZO thin films were deposited by RF magnetron sputtering,and then were etched by 0.1 percent aqueous solution of hydrochloric acid.The result shows that the surface roughness increase with the increase of etched time.When the etched time increases,both transmittance and reflectance decrease. |
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| Keywords: | transparent conductive film aluminum-doped zine oxide magnetron sputtering optical and electrical properties |
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