| 反射式高能电子衍射对氧化物薄膜生长的原位监测 |
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| 引用本文： | 王萍,解廷月. 反射式高能电子衍射对氧化物薄膜生长的原位监测[J]. 雁北师范学院学报, 2011, 27(5) |
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| 作者姓名： | 王萍 解廷月 |
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| 作者单位： | 山西大同大学物理与电子科学学院,山西大同,037009 |
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| 基金项目： | 山西省自然科学基金项目，山西大同大学博士科研启动基金项目 |
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| 摘 要： | 反射式高能电子衍射是一种对薄膜表面结构非常敏感的实时监测手段,通过对衍射花样的研究可以获得诸多有益的信息,将其引入薄膜制备装置对高质量薄膜的生长有着积极的指导意义。
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| 关 键 词： | 反射式高能电子衍射 氧化物薄膜 脉冲激光沉积 |
Monitoring of the Growth of Oxide Thin Films Using Reflection High Energy Electron Diffraction System |
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| WANG Ping,XIE Ting-yue. Monitoring of the Growth of Oxide Thin Films Using Reflection High Energy Electron Diffraction System[J]. Journal of Yanbei Teachers College, 2011, 27(5) |
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| Authors: | WANG Ping XIE Ting-yue |
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| Affiliation: | WANG Ping,XIE Ting-yue(School of Physics and Electronics Science,Shanxi Datong University,Datong Shanxi,037009) |
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| Abstract: | Reflection high energy electron diffraction（RHEED） is a kind of popular real time monitor method,which is highly sensitive to the surface structure of the films.It is very important to introduce RHEED system to the film deposition device because we can obtain much useful information about thin films from RHEED patterns. |
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| Keywords: | reflection high energy electron diffraction oxide thin films pulsed laser deposition |
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