| 微波等离子体CVD金刚石膜的温度效应 |
| |
| 引用本文： | 顾利萍,曹永浩,熊安邦.微波等离子体CVD金刚石膜的温度效应[J].常熟理工学院学报,2011,25(4):32-34. |
| |
| 作者姓名： | 顾利萍 曹永浩 熊安邦 |
| |
| 作者单位： | 1. 常熟理工学院,物理与电子工程学院,江苏常熟,215500;江苏省新型功能材料重点建设实验室,江苏常熟,215500
2. 常熟理工学院,物理与电子工程学院,江苏常熟,215500 |
| |
| 摘 要： | 采用微波等离子体CVD法,在其它生长条件和参数不变情况下,研究温度对制备金刚石膜的影响.通过扫描电镜、X射线衍射分析仪和拉曼光谱对样本的形貌和金刚石膜的质量进行了表征.
|
| 关 键 词： | 微波等离子体CVD 金刚石膜 温度 |
Effects of Temperature on Diamond Films Synthesized by MPCVD |
| |
| GU Li-ping,CAO Yong-hao,XIONG An-bang.Effects of Temperature on Diamond Films Synthesized by MPCVD[J].Journal of Changshu Institute of Technology,2011,25(4):32-34. |
| |
| Authors: | GU Li-ping CAO Yong-hao XIONG An-bang |
| |
| Institution: | GU Li-pinga,b,CAO Yong-haoa,XIONG An-banga(a.School of Physics and Electronics Engineering Changshu Institute of Technology,b.Jiangsu Key Laboratory of Advanced Functional Materials,Changshu Institute of Technology,Changshu 215500,China) |
| |
| Abstract: | The effects of temperature on the growth and quality of diamond films synthesized by microwave plasma assisted chemical vapor deposition were studied in this paper while all other process parameters remained unchanged..The morphologies of growth surface and qualities of the deposited samples were characterized by scanning election microscopy,X-ray diffractmeter and Raman spectra methods respectively. |
| |
| Keywords: | MPCVD diamond films temperature |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
