| 基于牺牲层释放的微悬臂梁器件制作中的粘附现象 |
| |
| 引用本文： | 梁明富.基于牺牲层释放的微悬臂梁器件制作中的粘附现象[J].扬州职业大学学报,2010,14(4):33-36,41. |
| |
| 作者姓名： | 梁明富 |
| |
| 作者单位： | 扬州职业大学,江苏扬州225009 |
| |
| 摘 要： | 以微悬臂梁的制作工艺为例,针对双材料悬臂梁加工中因为粘附现象造成废品率高的问题,分析了微悬臂梁加工中粘附影响因素,指出表面作用力和残余应力是造成粘附的主要原因,并提出相应控制措施。
|
| 关 键 词： | MEMS 微悬臂梁 粘附 牺牲层 |
Adhesion in Micro-cantilever Beam Component Manufacturing Based on Sacrificial Layer Release |
| |
| LIANG Ming-fu.Adhesion in Micro-cantilever Beam Component Manufacturing Based on Sacrificial Layer Release[J].Journal of Yangzhou Polytechnic College,2010,14(4):33-36,41. |
| |
| Authors: | LIANG Ming-fu |
| |
| Institution: | LIANG Ming-fu(Yangzhou Polytechnic College,Yangzhou 225009,China) |
| |
| Abstract: | Taking the manufacture craft of micro cantilever beam as an example,this article firstly analyses the adhesion factors in micro cantilever beam processing based on the high defective index of double material cantilever beam processing caused by adhesion.Then it points out that the adhesion is mainly caused by surface forces and residual stress.Finally,it offers the corresponding control measures. |
| |
| Keywords: | Micro-electric-mechanical system（MEMS） micro-cantilever beam adhesion sacrificial layer |
| 本文献已被 维普 万方数据 等数据库收录！ |
|
