| 硅集成电路研究 |
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| 引用本文： | 王月爱. 硅集成电路研究[J]. 中国现代教育装备, 2010, 0(3): 58-59 |
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| 作者姓名： | 王月爱 |
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| 作者单位： | 陕西国防工业职业技术学院,陕西西安,710300 |
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| 摘 要： | 本文介绍了硅集成电路的主要发展方向和趋势,重点阐述了硅集成电路制造过程中的关键技术和技术突破点。
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| 关 键 词： | 硅集成电路 发展趋势 关键技术 |
Silicon integrated circuit research |
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| Wang Yueai. Silicon integrated circuit research[J]. China Modern Education Equipment, 2010, 0(3): 58-59 |
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| Authors: | Wang Yueai |
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| Affiliation: | Wang Yueai (Shaanxi defense industry vocational and technical college, Xi＇ an, 710300 , China) |
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| Abstract: | This article describes the main development direction of silicon integrated circuits and trends, focusing on the manufacturing process of silicon integrated circuits in the key technologies and technological tipping point. |
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| Keywords: | silicon IC development tendency key technologies |
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