| 真空镀膜机控制系统的PLC改造 |
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| 引用本文： | 刘秋武. 真空镀膜机控制系统的PLC改造[J]. 韩山师范学院学报, 2010, 31(3): 48-52 |
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| 作者姓名： | 刘秋武 |
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| 作者单位： | 韩山师范学院,物理与电子工程系,广东潮州,521041 |
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| 摘 要： | 分析了ZD450型真空镀膜机的扩散油容易失效和真空计的电离规管容易损环的原因,设计了应用PLC对控制系统进行改造的方案.针对扩散油失效的原因是在关机前没有将真空室里的空气抽净,使扩散油高温氧化所致,增加了关机前的抽空冷却程序.针对电离规管灯丝烧断是由真空室里的压强未小于1×10~（-2）Pa时通电所致,增加了灯丝启动保护环节,并以FX_（2N）-4AD为A/D转换器作为真空测量机构代替真空计,提高了系统的自动化程度.
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| 关 键 词： | 真空 镀膜 PLC A/D转换 |
Control System Reforming of Vacuum Coating Machine by PLC |
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| LIU Qiu-wu. Control System Reforming of Vacuum Coating Machine by PLC[J]. Journal of Hanshan Teachers College, 2010, 31(3): 48-52 |
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| Authors: | LIU Qiu-wu |
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| Affiliation: | LIU Qiu-wu (Department of Physic and Electronic Engineering,Hanshan Normal University,Chaozhou 521041,Chian) |
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| Abstract: | The causes for failure of diffuse oil in the ZD450 vacuum coating machine and the reason of easily damaged ionization vacuum gauge are analyzed,and the PLC reforming scheme of the control system is designed.The reason for failure of diffuse pump oil is oxygenized in the high temperature chamber full of air before turning off,so a cooling and vacuum-pumping procedure is necessity.The filament of the ionization vacuum gauge is oxygenized and burns off when working above 0.01 Pa and a protective measures is adopted.In order to improve the system of automation,FX_（2N）-4AD A/D converter replaces the vacuometer. |
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| Keywords: | PLC |
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