| Preparation of Nano-Particles （ Pb, La）TiO3 Thin Films by Liquid Source Misted Chemical Deposition |
| |
| 引用本文： | 张之圣,曾建平,李小图.Preparation of Nano-Particles （ Pb, La）TiO3 Thin Films by Liquid Source Misted Chemical Deposition[J].天津大学学报(英文版),2004,10(1):59-62. |
| |
| 作者姓名： | 张之圣 曾建平 李小图 |
| |
| 作者单位： | SchoolofElectronicInformationEngineering,TianjinUniversity,Tianjin300072,China |
| |
| 摘 要： | Nano-particles lanthanum-modified lead titanate (PLT) thin films are grown on Pt/Ti/SiO2/Si substrate by liquid source misted chemical deposition (LSMCD). PLT films are deposited for 4-8 times, and thenannealed at various temperature. XRD and SEM show that the prepared films have good crystallization behavior and perovskite structure. The crystallite is about 60nm. The deposition speed is 3nm/min. This deposition method can exactly control stoichiometry ratios, doping concentration ratio and thickness of PLT thin films. The best annealing process is to bake at 300℃ for 10min and anneal at 600℃ for 1h.
|
| 关 键 词： | 制备工艺 纳米镧修正钛酸铅薄膜 液体雾化化学沉积 LSMCD PLT 结晶过程 半导体 |
Preparation of Nano-Particles (Pb,La)TiO3 Thin Films by Liquid Source Misted Chemical Deposition |
| |
| ZHANG Zhi sheng,ZENG Jian ping,LI Xiao tu.Preparation of Nano-Particles (Pb,La)TiO3 Thin Films by Liquid Source Misted Chemical Deposition[J].Transactions of Tianjin University,2004,10(1):59-62. |
| |
| Authors: | ZHANG Zhi sheng ZENG Jian ping LI Xiao tu |
| |
| Abstract: | Nano-particles lanthanum-modified lead titanate (PLT) thin films are grown on Pt/Ti/SiO2/Si substrate by liquid source misted chemical deposition (LSMCD). PLT films are deposited for 4-8 times, and then annealed at various temperature. XRD and SEM show that the prepared films have good crystallization behavior and perovskite structure. The crystallite is about 60 nm. The deposition speed is 3 nm/min. This deposition method can exactly control stoichiometry ratios, doping concentration ratio and thickness of PLT thin films. The best annealing process is to bake at 300 ℃ for 10 min and anneal at 600 ℃ for 1 h. |
| |
| Keywords: | liquid source misted chemical deposition (LSMCD) nano particle (Pb La)TiO 3 thin films XRD SEM |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
